Used HITACHI M 712E #9008886 for sale

Manufacturer
HITACHI
Model
M 712E
ID: 9008886
Dry etcher power supply.
HITACHI M 712E is an etcher / asher designed to etch and ash materials, including wafer-thinning and residue removal, at high precision and high speed. It is capable of high speed precision etching of up to 6.5 mm2 / min, and employs an advanced adaptive plasma generator system, allowing it to accurately control the etching and ash rate as needed. HITACHI M712E's chassis is composed of a sheet steel reinforced steel plate, ensuring the device's stability and durability, while its internal components include a set of drawer-type pumping systems as well as a 100 kV/1250V frequency-pulse generator with an ash time range of 0-60 sec. It also includes an electromagnetic bath, the Eme-ARM processing chucks, two pneumatic cylinder assembly, and a high vacuum gas panel. Other features and components of M 712E that contribute towards its superior performance include an independent, high-performance antenna, multi-level automatic flow control, automatic atmosphere circuit changing, and an independent two-level electrode antenna. The Ethernet/RS-485 Interface for process monitoring and control ensures easy system operation and control, and the full-colour LCD touchscreen uses intuitive symbols and characters that can be easily understood and used, allowing users to handle the device with great precision and speed. The Vacuum Reference Technology used in M712E further ensures that opera-tors can accurately monitor the process rate, temperature, gas flow, pressure, and other parameters. The user interface of HITACHI M 712E is designed to maximize processing efficiency, and allows for machine and material-specific settings such as batch, panel, wafer size, etching rate, etc. to be configured. It also includes a data functionality for real-time display of wafer state, process result and detailed operating records. The machine provides both online and offline operation and is capable of multi-step processing and multiple program modes are available for different processing requirements. HITACHI M712E is easy to use and install, and designed to maintain the highest levels of safety while it is in operation. It is also compliant with a range of global safety standards and certified with CE marking as well as other certifications like UL and RoHS.
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