Used HITACHI M 712XT #293750872 for sale
URL successfully copied!
Tap to zoom
ID: 293750872
Vintage: 2006
Etcher
EPD detectors with OES and EPD computer systems
SHIMADZU Turbos
EDWARDS IQDP and PUP Dry pump
Dual zone temperature ESC
HITACHI Robots
(4) Floor chillers
(3) Load ports
(2) Etch process chambers
Chamber 1: (8) Stick gas panels
Chamber 2: (10) Sticks gas panels
Dual wafer substations on transfer module
Process kit included
2006 vintage.
HITACHI M 712XT is an etcher and asher designed to precision etch and asher wafers, foil, glass, and other materials. This device utilizes dual gallium-nitride-based electron-multiplied CCD (EMCCD) imaging technology that provides improved resolution and contrast, enabling extremely precise patterning and wafer ashing. The simultaneous imaging on both sides of a wafer increases quality and process stability while the uniformity of the thermal head makes it ideal for challenging process applications. The high-speed stage and fast scanning speed improve efficiency and reduce cycle time for critical applications. The device includes a CCD image acquisition unit and a stage controller which ensures accurate alignment and positioning of the sample. It is also equipped with a precision galvo positioning system for the fastest and most precise ashing operation available, for both single and multi-sample applications. The stage can be programmed for 150-500mm travel to accommodate wafers of various sizes. M 712XT offers extensive control over the machining parameters and process settings. This allows for rapid adjustments of parameters such as junction depth, annealing temperature, and etch rate. It offers external trigger, analog signal, and control via analog signal inputs. The built-in powerful control software enables easy panel-type operations to enable these multi-module functions. The device's excellent performance and ease of use makes it ideal for demanding photolithography processes, including fine line resolution and deep profile annealing. Its versatility is further enhanced by its compatibility with various precision etching and asher materials, including silicon, silicon dioxide, quartz, and silicate glass. {Various modules configuration can be used to provide high-precision, high-accuracy, or high-thickness patterns.} This device offers some excellent features that make it one of the most powerful etchers and ashers available. Its ionic etch rate control enables fast etching and ashing, providing high material removal rates. The chemical-resistant, stainless steel housing and sealed optics protect the samples from contamination while the flexure-mounted wafer holder keeps the wafer precisely leveled. HITACHI M 712XT is a highly versatile and reliable etching and ashing system that allows for the precise processing of challenging materials. Its powerful and precise control software offers intuitive operation while its compatibility with various materials and fast etch rate control help ensure superior results.
There are no reviews yet