Used HITACHI M 8170 XT #293774673 for sale

HITACHI M 8170 XT is a cutting-edge etcher/asher equipment designed for high-precision, high-throughput processing of semiconductor wafers in advanced manufacturing environments. This sophisticated tool combines innovative technologies and advanced features to deliver superior performance and reliability in semiconductor fabrication processes. At the heart of HITACHI M 8170XT system is its dual-mode functionality, which allows it to perform both etching and ashing processes with exceptional precision and control. The unit is equipped with multiple gas injection channels, advanced plasma generation technology, and a highly configurable chamber design to provide a wide range of process capabilities for various applications. One of the key features of M8170 XT is its advanced gas delivery machine, which ensures precise control over the flow rates and ratios of process gases to achieve the desired etching or ashing results. The tool is capable of handling a variety of gases, including fluorine-based, chlorine-based, and oxygen-based gases, allowing for flexibility in process development and optimization. HITACHI M8170 XT is also equipped with a highly configurable chamber design that enables customized process conditions and chamber geometries to suit specific process requirements. The chamber features a dual-mode operation with separate sections for etching and ashing processes, allowing for independent process optimization and control. In terms of plasma generation, M 8170 XT utilizes advanced radiofrequency (RF) plasma technology to generate high-density, uniform plasma across the wafer surface. This results in efficient and uniform removal of material during the etching process, as well as effective removal of photoresist and other organic residues during the ashing process. The asset is further enhanced by its advanced endpoint detection capabilities, which enable real-time monitoring and control of the etching/ashing process based on predefined parameters. This ensures precise and repeatable results, even for complex and demanding process recipes. M 8170XT is designed with user-friendly interface and software control to facilitate ease of operation and maintenance. The model features comprehensive diagnostics and monitoring tools for equipment health checks, as well as data logging and reporting capabilities for process analysis and optimization. Overall, HITACHI M 8170 XT represents a state-of-the-art etcher/asher system that delivers exceptional performance, reliability, and flexibility for semiconductor processing applications. With its advanced features and innovative technologies, this unit is well-suited for a wide range of advanced manufacturing environments where high precision and high throughput are essential requirements.