Used INTERNATIONAL PLASMA CORPORATION 3000 PN-1813 #293827895 for sale
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ID: 293827895
Wafer Size: 4"
Plasma ashing system, 4"
Pump / Blower models: D30A
(8) Cryopump
CTI-CRYOGENICS 8200 Compressor
Power supply.
INTERNATIONAL PLASMA CORPORATION 3000 PN-1813 is a cutting-edge etcher/asher equipment that offers advanced plasma processing capabilities for semiconductor fabrication and other high-tech industries. This system is designed to provide precise and uniform plasma etching and ashing of various materials with high throughput and repeatability. It incorporates state-of-the-art technologies and features to meet the demanding requirements of modern manufacturing processes. The unit utilizes a reactive ion etching (RIE) process to remove material from the surface of a substrate with high precision and control. It also offers ashing capabilities for the removal of photoresist and other organic contaminants from the substrate surface. The PN-1813 is equipped with multiple gas injection ports, RF power supplies, and temperature control systems to tailor the plasma process parameters according to specific application requirements. One of the key features of 3000 PN-1813 is its advanced vacuum machine, which ensures a clean and stable processing environment. The tool is equipped with a turbomolecular pump, cryogenic pump, and various pressure gauges to achieve and maintain the required vacuum levels for optimal plasma processing performance. The vacuum asset also includes a load lock chamber for efficient substrate loading and unloading without compromising the process chamber's vacuum conditions. The PN-1813 model is controlled by a user-friendly interface that allows operators to set and monitor process parameters, recipe profiles, and real-time data feedback. The equipment's software enables precise control of gas flow rates, RF power levels, process time, and other critical parameters to achieve the desired etching and ashing results consistently. The software also includes diagnostic tools for troubleshooting and preventive maintenance to minimize downtime and maximize productivity. In terms of plasma generation, INTERNATIONAL PLASMA CORPORATION 3000 PN-1813 utilizes a high-frequency RF power source to create and sustain the plasma within the process chamber. The plasma is generated by applying RF power to the gas mixture injected into the chamber, resulting in the formation of reactive species that interact with the substrate surface to etch or ash the material effectively. The system's power supplies are designed to deliver stable and reliable RF power for consistent plasma performance throughout the processing cycle. The PN-1813 is built with high-quality materials and components to ensure long-term reliability and durability in a production environment. The unit features an ergonomic design for easy maintenance access and serviceability, allowing for quick and efficient troubleshooting and component replacement when needed. INTERNATIONAL PLASMA CORPORATION also offers comprehensive training programs and technical support services to assist customers in maximizing the performance and uptime of the PN-1813 machine. In conclusion, 3000 PN-1813 etcher/asher tool represents a cutting-edge solution for high-precision plasma processing applications in semiconductor manufacturing and other advanced industries. With its advanced technologies, precise control capabilities, and robust design, the PN-1813 is poised to deliver superior etching and ashing performance for a wide range of materials and substrates, making it an ideal choice for companies looking to achieve high-quality and reliable plasma processing results.
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