Used JESAGI JSPES-W21 #293761868 for sale

JESAGI JSPES-W21 is an etching and ashing equipment designed to provide high –accuracy processing of circuits and semiconductors. The system is equipped with a microwave plasma source, designed for low temperature etching, and a thermal chemical etch for higher temperature ashing. The unit is equipped with two independent, high-resolution process chambers with a vacuum capacity of approximately 200-400 mTorr, providing optimal precision and control. Additionally, the etcher has a maximum process chamber size of 800 mm x 800 mm, allowing the user to process larger substrates. The unit features a unique combination of a planar inductive coil, together with a microwave energy source, to optimize wafer homogeneity during etching. The aspect ratio capabilities range from 0.5:1 to 4:1, allowing for the fabrication of dense and shallow structures, as well as the microstructure feature size of below 1 micron. JSPES-W21 is also equipped with automated control capabilities with a user-friendly software interface. It allows for programmable setpoints and recipe management, with the ability to save and recall etching and ashing recipes, as well as to monitor the process in real-time. Additionally, the integrated programmable logic controller (PLC) provides for for simplified hardware operations and service, with a diagnostics and maintenance machine for reducing overall manual effort. JESAGI JSPES-W21 also features a vertical load-lock robot assembly to minimize the tool footprint and maximize production throughput. The load-lock robot can handle standard and custom substrates with maximum size of 200 x 200 mm, and with a total of 10 top and bottom loaders, it latches a maximum of 20 wafers at a time to the process chambers. The innovative Load-Lock Asset is configured to enable easy maintenance and upgrades through its modular design. In conclusion, JSPES-W21 is a robust and modular model, providing accurate etching and ashing capabilities with programmable automation. The equipment is suitable for small to medium scale production, providing precision processes with reliability and fast turnaround times. With its automated control and low temperature capability, it can enable the fabrication of diverse and intricate structures.