Used KEM / KOKUSAI Lambda 200 #9075057 for sale

KEM / KOKUSAI Lambda 200 etcher/asher is a precision etching and ashing equipment designed for use in a variety of fields-particularly integrated circuit fabrication and micro-fabrication. This system utilizes oxygen reactivity to etch and ash metals, ceramics, and silicon materials. KEM Lambda 200 is designed with a range of etching and ashing capabilities with a variety of design options. The basic unit includes an etch chamber and matching ashing chamber. These chambers are connected via a load lock making the transfer of substrate from one chamber to the other efficient and traceable. The etching chamber contains a DC power supply with externally controllable pulse capabilities ranging from 1 to 25 mA. This allows the user to precisely control etching and provide improved selectivity by adjusting reactivity at high rates. The high rate reduces the effects of line narrowing at the corners of structures. Additionally, the power supply supplies DC bias with an adjustable parameter range up to 4V. This bias helps in achieving different etching processes. The etching chamber has a four-stage turbomolecular vacuum machine and is backed by a direct drive motor for high throughput. Additionally, the chamber has a linear motion stage for substrate translation and an optical port for viewing of the etching process in-situ. The ashing chamber is coupled with an oxygen ashing tool. This asset has three independent gas valves and allows for independent adjustments and combination for optimal results. Additionally multiple gases such as Nitrogen, hydrogen, argon, and CO2 can be used to control the etching or ashing process. The model is designed with easy-to-use automated sequencing and the entire process can be set up from a connected computer. This makes the equipment very efficient. All data about the process can also be recorded and stored for historical analysis. KOKUSAI Lambda 200 is a robust and reliable etching and ashing system that provides repeatable and reliable results and can be used for a variety of applications. This, among other features, makes it a great choice for a variety of etching and ashing tasks.