Used KEM / KOKUSAI Lambda 200C #293643016 for sale

KEM / KOKUSAI Lambda 200C
ID: 293643016
Wafer Size: 8"
Vintage: 2001
Asher, 8" 2001 vintage.
KEM / KOKUSAI Lambda 200C is a type of plasma etcher/asher used in microcircuit fabrication and semiconductor research and development. This advanced etcher/asher is equipped with a high-vacuum chamber and has a capacity of up to 200watts. With a 24-inch radius, the machine is able to rapidly etch or asher small- to medium-sized components. KEM Lambda 200C is equipped with two independent, 200 watt Plasma Generator power supplies, making it highly reliable with a consistently stable operation. In addition, it has a compact design, lower noise output and vibration-free operation so it can be placed in a fume hood or laboratory. Its chamber is made up of an antechamber and a main etching chamber and has a safe, single-point dedicated turbo-molecular pump. The etching and ashing features of KOKUSAI Lambda 200C are also superior than other etchers/ashers. The etching function utilizes a low-temperature plasma that can etch through dielectrics, metals and various materials without generating significant heat. The ashing process of the machine uses activated oxygen radicals to remove photoresists, leaving the layer substrate unaffected. Control-wise, Lambda 200C is user-friendly with its intuitive touch-screen graphical user interface and its memory capacities. The etcher/asher can store up to 99 process recipes, which can be edited, duplicate and saved. Moreover, this model has both manual and programmed operational modes, making for an easier and more efficient operation. Overall, KEM / KOKUSAI Lambda 200C is an advanced etcher/asher designed to deliver precise, consistent etching and ashing results on a wide range of materials. With its intuitive user interface, high-vacuum chamber and extended plasma generator power supplies, it is an ideal choice for research and development, as well as mass production.
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