Used LAM RESEARCH 2300 Exelan #9116018 for sale
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ID: 9116018
Wafer Size: 12"
Vintage: 2002
Dielectric etcher, 12"
1600 L/S Edwards turbo pump
PM ISO Valve: Chemraz rocker valve
NSR5247 A: Flex Configuration
2300 Exelan quick clean kit
2300 Exelan pend
Valve kit
2300 Exelan gas box
Regulated Inlet (per Gas Line)
(12) Gas configuration
Aera FC-D980CU MFC
NSR5248_A: Line 11 100sccm O2/He (30%)
Delta stacking kit
2300 Platform
(3) FOUP
WIDS BTM Read
User interface: Side and front monitor
System UPS circuitry
Cable: TM-subpanel, 50FT
SYS Calibration and alignment
TM NSR 1: VTM Dynamic alignment
Currently installed
2002 vintage.
LAM RESEARCH 2300 Exelan is a state-of-the-art high quality etcher and asher that is used in the manufacturing of high-end semiconductor components. It is equipped with advanced process control, a unique clean chamber design, and precision antennae which allow for greater consistency and accuracy in the etching process. 2300 Exelan combines advanced RF liftoff technology with a high-resolution, precise imaging system to produce accurate etch patterns. This process creates precise, three-dimensional topographies on integrated circuits and other electronic components. By controlling the wattage used in the process and regulating the time of exposure, the accuracy of the etch pattern can be controlled. The unique clean chamber design of LAM RESEARCH 2300 Exelan helps to ensure optimal cleanliness during the proces. This design features stainless steel panels and doors, a transparent observation window, dual-stage filtration system, low particulation integrity and optimised air filtration flow. This helps to reduce contamination, improve yields and minimise the effects of corrosion. 2300 Exelan is also equipped with a number of integrated safety features to protect the operator, the chamber and the equipment. These include fire detection, temperature control, and pressure monitoring systems. This helps to minimise the risk of damage to the components being etched. LAM RESEARCH 2300 Exelan also features a powerful controller unit, which allows for efficient and accurate process control. This ensures that the etching process is done with precision, and is consistent from batch-to-batch. The controller unit also allows for easy monitoring of the process, such as temperature, pressure, voltage, and current, which help to ensure quality control in the operation of the device. Overall, 2300 Exelan is an advanced, high-quality etching and ashing device that is designed to provide precise and reliable results. Its advanced features allow for precise and accurate etching, while also allowing for a high degree of safety and quality control. This makes LAM RESEARCH 2300 Exelan an ideal tool for etching and ashing semiconductor components.
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