Used LAM RESEARCH 12123-1-D-00162104 #9143213 for sale

LAM RESEARCH 12123-1-D-00162104 is an etcher/ asher designed primarily for semiconductor manufacturing. This device is a full-featured, high-speed production tool capable of continuously operating in a wide variety of plasma-based processes. It is designed to operate in deep reactive ion etch (DRIE) mode and shallow trench formation (STF) mode for a wide range of applications including etching of aluminum, copper, silicon dioxide, and organic materials. 12123-1-D-00162104 etcher/ asher has a process chamber that is 20"x 15" in size, allowing for a multitude of different etching and ashing processes to be conducted simultaneously. The chamber is equipped with a direct drive motor and delivers precise gas flow to provide excellent results and repeatable results. It has an advanced process controller for configuring optimal process parameters and is designed to be compatible with existing production operations. The device utilizes a dual-pass design for efficient processing, which allows for both high-speed etching and downstream ashing to occur in a single pass. LAM RESEARCH 12123-1-D-00162104 Etcher/ Asher is designed to provide superior uniformity in etching, enabling higher productivity and quality in manufacturing. It has the ability to control the etch rate across both the wafer and the etching mask, providing precise etching of critical layers. It also features an advanced gas distribution system that evenly distributes gases to help ensure uniform films on patterned features. This ensures that the layers are evenly deposited, allowing for stable operation and reliability in production. The device is equipped with an alarm system and provides temperature and pressure monitor alarms. It also has advanced diagnostic capabilities which help to detect any potential issues in the process chamber. LAM RESEARCH 12123 etcher/ asher can be seamlessly integrated into existing production lines, and its advanced functionality can be leveraged to provide a wide range of efficient and cost-effective processing capabilities.