Used LAM RESEARCH 2300 e5 Kiyo #9172842 for sale

LAM RESEARCH 2300 e5 Kiyo etcher/asher is a powerful, compact equipment designed for high-throughput applications requiring precise etching, ashing, and other materials processing. It provides single-step etching and ashing, as well as etching/ashing combinations, that reduce cycle times while ensuring uniformity. This system features an adjustable wafer-to-substrate distance, an enhanced gas capability, a "gull wing" nozzle design for increased throughput and uptime, and a suite of built-in cycle diagnostics for fast troubleshooting. This machine is also equipped with two integrated process chambers, each of which is capable of working with up to eight wafers simultaneously, enabling maximum tasks per hour. With this configuration, 2300 e5 Kiyo etcher/asher can operate in plasma etching, plasma ashing, exposed-silicon etching, and exposed-surface-oxide etching modes. This unit can also be used for high-end thermal oxidation and CVD processes—utilizing nitrogen, nitrous oxide, oxygen, helium, and other gases—and is capable of achieving process temperatures of up to 1150 degrees Celsius. LAM RESEARCH 2300 e5 Kiyo etcher/asher has a precision-crafted metal oxide hardening for longer product life and improved wafer edge retention. The hardening surface also improves safety since its design prevents electrical discharge issues. This machine features a customizable control interface with an intuitive graphical user interface (GUI) and self-diagnostic capabilities. The GUI displays real-time machine conditions and allows users to execute a variety of on-the-fly recipe adjustments for optimum results. This machine is constructed of robust materials to ensure maximum uptime and reliability, and is constructed to be integrated into any environment—including manual, semi-automated, and fully automated. A comprehensive array of options and plug-and-play components make it easy to customize the tool for any process or application. Its design also facilitates easy maintenance and can be expanded with additional parts and accessories, such as integrated, automated diagnostic algorithms that control consumables and hardware during processing. Additionally, 2300 e5 Kiyo etcher/asher complies with environmental and health standards.