Used LAM RESEARCH 2300 Exelan Flex 45 #9015441 for sale

LAM RESEARCH 2300 Exelan Flex 45 is an advanced etcher and asher used primarily in the semiconductor industry. It is designed to deliver both precise etching and ashing of tiny features, with automated tool control and precise uniformity throughout the entire process. The Exelan Flex 45 has the flexibility to address a range of substrates and processes, such as high-aspect-ratio features, wafer thinning, and 45-degree angled etch applications. The Exelan Flex 45 features a tool closed-architecture that integrates platform and process hardware with a range of vacuum pumps, load-locks, and source modules which provide the flexibility to tune the process for the desired result. This level of integrated hardware increases process precision, reduces operating cost, and ensures quick wafer throughput. The etcher/asher is controlled by an embedded process controller, which enables the operator to monitor each etch process in real-time with a graphical user interface. The embedded process control also allows for pre-programmed recipe set-up and process control as well as providing an accurate, repeatable process each time the etch recipe is run. The Exelan Flex 45 also features an advanced etch chamber design that increases uniformity, improves wafer cleaning during the process, and helps minimize cross-contamination. The full-platform vacuum construction helps to minimize particulate incursion and reduce the loss of valuable halogendated etchants. The etcher/asher is also equipped with a variety of safety features, such as an emergency shutoff switch, audible alarms, and closed-architecture system that prevents accidental exposure to high temperatures or chemical vapours. These features ensure that operators and bystanders are kept safe during operation. 2300 Exelan Flex 45 is the ideal etcher/asher for those looking for top-notch precision and repeatability. With an integrated etch chamber design and automated tool control, users can trust that each etch will produce accurate results. Furthermore, with a range of safety features, users can feel confident that their operators and bystanders are kept safe and secure.