Used LAM RESEARCH 2300 Exelan Flex 45 #9252457 for sale

LAM RESEARCH 2300 Exelan Flex 45 is an etcher / asher that provides superior performance and stability in today's highly integrated, next-generation device fabrication processes. This model of the etcher / asher is capable of processing large substrates up to 45 inches in diameter with the utmost accuracy and precision. The 2300 Exelan Flex is built with an advanced source chamber that can be configured for various processes such as wet etching, dry etching, resist strip, ashing, and embedment-etching. The chamber features a dual-zone thermal control to ensure uniform and consistent etching throughput, as well as a fully automated loading and unloading equipment for efficient processing. The chamber also contains Gaussian photon beam sources for efficient etching, ensuring that process time is reduced and etch rates are maximized. The 2300 Exelan Flex also features a variety of process control features for accurate and reliable etching and ashing. This includes RF and DC power control, pressure control, substrate biasing, and uniform temperature control. This advanced system also features a process monitoring unit, which ensures that the etching or ashing process is performed in an accurate and consistent manner. The 2300 Exelan Flex also includes an automatic alignment machine for positioning the wafer on the platen. This tool is capable of achieving an alignment accuracy of less than 5µm without any manual intervention. Furthermore, its pressure control asset ensures uniform pressure delivery on the wafer during the etching or ashing process. The 2300 Exelan Flex also includes several advanced safety measures, such as the dual isolation interlock model, to ensure the safety and accuracy of the etching process. It also has an alarm monitoring equipment that sends audible warning signals when process changes occur, so that the operator can quickly evaluate and adjust the system accordingly. Finally, its remote service capability allows for easy and convenient maintenance of the etcher / asher. All in all, 2300 Exelan Flex 45 is a powerful etcher / asher that offers superior performance and stability for next-generation device fabrication processes. Its advanced features and safety measures ensure accurate and reliable etching and ashing results in a safe, efficient, and cost-effective manner.