Used LAM RESEARCH 2300 Exelan Flex EX+ #293641915 for sale
URL successfully copied!
Tap to zoom
ID: 293641915
Wafer Size: 12"
Etcher, 12"
Aligner
BROOKS Express load port
571-810321-10598 EFEM
BROOKS 138150 Robot
571-810320-10598 VTM
108000-37 VTM Robot magratran 7
101543506270005 AC Rack
108358 Robot controller
571-035344-10598 GIB
(3) Process Modules (PM)
853-243881-001 Generator cart
RPDB
Gas box:
Part number / Line / Description
571-033051-001 / 16 / IGS Gas box
571-033051-002 / 16 / IGS Gas box
571-033051-003 / 16 / IGS Gas box
Missing parts:
(2) Signal tower lamps
(3) 853-040482-600 Matchers
(3) 660-080455-300 Generators, 2MHz
(3) 660-072825-200 Generators, 27 MHz
(3) 660-072826-200 Generators, 60 MHz
(3) 628D-26910 CM1 BARATRON Manometers, 100 mT
(3) EI-R04M Turbo pump TMP-2804LMC Controllers.
LAM RESEARCH 2300 Exelan Flex EX+ Etcher/Asher is a compact yet powerful machine that has been designed to ensure superior results in a wide range of etching and ashing processes. It is ideal for a variety of production and research applications such as counter-doping studies and our highly efficient ion beam sputter etching. The etcher is equipped with a variety of features that enable it to deliver maximum performance and reliability. The equipment comprises of a fixed-speed exhaust blower that ensures economical operation, allowing the system to operate for long production runs without the risk of damaging components. It is designed with a number of advanced features that allow for fine control over etch rate and uniformity. The Exelan Flex EX+ is capable of a wide range of etch chemistries including: chlorine, bromine, fluorine, sulfur, aluminum, and titanium etchants. The unit can safely process metal, ceramic, or polymer substrates in a variety of sizes, shapes, and thicknesses. Its patented reacto-electric reduction machine allows etch processing with up to six wafer processing locations. The tool is easy to use and the perfect fit for research, single-lot manufacturing, and batch production. It offers superior surface quality and particle control, as well as high uniformity across the entire length of the chamber. The extensive set of safety features not only ensures the long life of the asset, but also makes it one of the safest systems of etchers/ashers in the market. Designed for ultimate reliability, the Exelan Flex EX+ delivers a consistently reliable performance, making it the ideal solution for a number of etching and ashing processes. The efficient, space-saving design allows it to fit into a variety of lab and production settings. 2300 Exelan Flex EX+ Etcher/Asher is a reliable model that is sure to deliver superior results.
There are no reviews yet