Used LAM RESEARCH 2300 Exelan Flex EX+ #293643636 for sale

LAM RESEARCH 2300 Exelan Flex EX+ is a highly efficient etcher / asher, designed to support both wet and dry processes for a wide range of applications. It features a robust equipment architecture to maximize productivity and throughput, and improved cooling features for superior process uniformity, especially in dry processes. 2300 Exelan Flex EX+ is equipped with a proprietary low-pressure Chlorine-based gas injection system, allowing users to leverage gas concentrations at a much lower level compared to conventional etching systems. This, along with its superior temperature uniformity, precisely controls etch rates over a range of materials, making it ideal for advanced process integration and precision etching applications. LAM RESEARCH 2300 Exelan Flex EX+ also features an advanced unit architecture designed for uniformity, repeatability and optimized process control. 2300 Exelan Flex EX+ also features advanced, flexible design options to accommodate different substrate sizes and geometries. Its three-zone pump machine configures to optimize all substrate size requirements across all processing modules, providing the perfect uniformity, homogeneity and engineering control. Its unique multi-axis configurable end-effector enables a reliable, smooth positioning of substrates in the target module, allowing for precise and repeatable process execution. In terms of safety, LAM RESEARCH 2300 Exelan Flex EX+ comes with an advanced process monitor that ensures proper substrate transfer and accurate process control. It also provides various fine-tuning and diagnostic tools to ensure optimal performance and process consistency, as well as real-time process flow monitoring which allow for troubleshooting of unexpected issues. In summary, 2300 Exelan Flex EX+ is a cutting-edge etcher / asher that offers excellent etching capabilities, robust tool architecture, improved cooling, as well as flexible design options for different substrates. It is designed for precision and repeatability of etching processes and features advanced features for greater process control and safety.