Used LAM RESEARCH 2300 Exelan Flex FX #293609173 for sale

LAM RESEARCH 2300 Exelan Flex FX
ID: 293609173
Dielectric etcher.
LAM RESEARCH 2300 Exelan Flex FX is an advanced etcher / asher equipment specially designed for use in photomasking operations. It integrates innovative process control and management solutions to produce high-quality etched patterns. The system provides flexibility in etching and stripping rates, high selectivity and excellent process stability, as well as high productivity. This makes it suitable for a wide range of applications in semiconductor, MEMS, and exhibition technology segments. The unit uses laser beam, reactive ion etching (RIE) and plasma-based etching processes. 2300 Exelan Flex FX is designed with an open architecture, allowing users to customise the etching parameters and process parameters. This machine provides high reproducibility, superior selectivity and superior etch rates. The in-situ control and management solution enables users to program and control multiple processes simultaneously, reducing programming time and cost. In addition, it provides real-time process information for improved process understanding and corrective action. The tool is equipped with an ultra-high resolution, 3D image sensor for precise etch patterning and process control. It also features a configurable, laser-beam delivery asset for precise control of the beam power and direction. LAM RESEARCH 2300 Exelan Flex FX offers automatic process control to ensure optimal results on all etching and stripping tasks. The etcher is designed with a patented highly reliable gate model and precise heating and cooling systems to maintain desired temperature during the etching process. Moreover, 2300 Exelan Flex FX offers precise pressure and flow control mechanisms to optimise etching applications and a range of diagnostic tools to monitor process performance. Its control module enables users to configure equipment parameters to ensure optimal etching profile and results. The high selectivity and optimal etch rates enable rapid device completion. The system is also designed with safety features, such as interlocks, in-situ process control, and pressure monitoring which ensure operator safety at all times. Overall, LAM RESEARCH 2300 Exelan Flex FX is a highly advanced etching unit providing users with precise control, robust and reliable process control, high fidelity etch patterning, and precision process management. This makes it an ideal choice for photomasking operations and industry leading technology segments.
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