Used LAM RESEARCH 2300 Exelan Flex FX #293826277 for sale

LAM RESEARCH 2300 Exelan Flex FX+ is an advanced asher / etcher for production applications. The equipment provides excellent productivity, flexibility and process scalability for a range of advanced process flows. The system has a rotorless, high-aspect ratio design, with an unrestricted and non-stabilized process chamber. This design ensures repeatable, reliable etch performance regardless of the substrate size, shape, or surface finish. The unit features advanced control technology, including PID adaptive control, which offers precision control over etch parameter matching, large process chamber flexibility, and fast process start-up times. Additionally, the Exelan Flex FX+ is designed to accommodate large-area wafers up to 300 mm. The Exelan Flex FX+ comes with an optional process module for enhanced process development, which includes a multi-network distributed control machine (MNDCS) and a HiFlex multi-function user interface for unprecedented control and access to all process parameters. Additionally, an optional load lock tool (LLS) can be added for improved process control, especially when running multiple substrate sizes. The asset also offers a wide range of etch profiles including cusp, E-Beam, V-Beam, and Deep Trench, to name a few. Furthermore, the model is compatible with a variety of base gases, including hydrogen, argon, fluorocarbons, and nitrogen, and a range of process chemistries for optimal etch of any material. Additionally, the Exelan Flex FX+ is designed to be integrated into a wide array of existing and new semiconductor production systems. The equipment is capable of integrating into Python Script-based processes, and is completely compatible with the most commonly used programmable logic controllers (PLCs). Overall, 2300 Exelan Flex FX+ is an advanced asher / etcher, with superior process scalability, process flexibility, and reliable etch performance. The system is suitable for a wide range of advanced etch processes, and is capable of integrating into any existing semiconductor production unit.