Used LAM RESEARCH 2300 Exelan Flex FX #293826278 for sale

LAM RESEARCH 2300 Exelan Flex FX is a state-of-the-art plasma etcher and asher ideal for microelectronics fabrication. It is engineered to provide superior performance in etching and ashing processes for advanced materials and device applications. The Exelan Flex FX provides a unique combination of the flexibility to address a variety of etching and ashing process requirements and the scalability to accommodate the future needs of smaller feature sizes. It can be configured with a variety of etching and ashing chambers and sources to meet a wide range of application requirements. The equipment is capable of producing high aspect ratio features with aspect ratio control while maintaining throughput, uniformity and uniform feature size between etched features. It features advanced process control features including the ability to adjust plasma parameters and the ability to precisely control etching parameters such as etch rate, bias current, line width and etch feature selectivity. It also features enhanced process monitoring and data logging capabilities to facilitate optimization and analysis of the etching process. In addition to its superior etching and ashing performance, the Exelan Flex FX provides a variety of other features and options to support the advanced needs of today's microelectronics fabrication processes. The system is capable of advanced safety monitoring to prevent accidents and process disruptions. It is also compatible with a variety of plasma chemistries, enabling the use of a wide range of feedstocks. It also includes remote diagnosis and monitoring for enhanced throughput and productivity. The unit is equipped with an advanced remote diagnostic machine to enable quick and accurate diagnosis of plasma process problems and fault detection. The Exelan Flex FX also includes a remote monitoring tool to measure process parameters and enable remote monitoring of the etching process in real time. The Exelan Flex FX is fully configurable to meet the needs of both traditional and advanced etching and ashing processes. It is capable of extending etching and ashing capabilities beyond the conventional horizontal etch chambers to enable improved performance and throughput of vertical structures. The modular design of the asset also provides options for integrating post-etching and sample handling for accelerated process throughput and improved overall efficiency. 2300 Exelan Flex FX is a powerful tool for microelectronics fabrication, offering a unique combination of flexibility, scalability, and advanced process control features. This model is ideal for those who need the performance and features to address a wide range of etching and ashing process requirements.