Used LAM RESEARCH 2300 Exelan Flex FX #9359417 for sale

LAM RESEARCH 2300 Exelan Flex FX is an advanced etch / asher equipment designed for high throughput manufacturing. It offers maximum flexibility for a wide range of critical applications such as photovoltaics, semiconductors, MEMS, optoelectronics, and other nanostructures. This cost-effective system can be used to etch multiple layers of various materials with consistent high yields. Additionally, its unique design offers excellent uniformity in etching, as well as excellent cleaning performance. 2300 Exelan Flex FX offers superb process flexibility for applications requiring repeatable, uniform etching as well as high batch throughput. Its dynamic Gas Flow process enables it to etch up to four layers of different materials simultaneously. The multi-layer etching support feature also permits simultaneous patterning and etching of different materials. The unit's high precision and speed facilitate faster turnaround time for complex patterns, reduced cycle time, better uniformity of the etch quality, and improved yields. In terms of the etch source, LAM RESEARCH 2300 Exelan Flex FX comes with a High energy Density Etch Source (HEDES) and a wide range of process gases to support various types of etching applications. Its HEDES generates high energy, allowing for fast etching rates with high anisotropy. It also comes with an advanced thermal control machine that provides superior control over elevated temperature for a repeatable process. 2300 Exelan Flex FX includes an advanced safety feature ensuring safe operation and preventing cell damage due to accidental power shortages. Its advanced monitoring capabilities also allow users to observe and monitor individual cell performance in real-time. LAM RESEARCH 2300 Exelan Flex FX also includes advanced diagnostics functions providing reliable etch stability as well as repeatability verification in multiple layers of etching. Additionally, its unique chamber design features a removable chamber base allowing for easy cleaning and maintenance. It is also equipped with powerful adaptive control systems that enable excellent process accuracy, reproducibility, as well as flexibility to adapt to changing part configurations. Overall, 2300 Exelan Flex FX is an excellent etcher / asher tool designed to offer maximum flexibility and reliable etching performances for a wide range of critical applications. It offers unmatched performance, precision, and safety features while providing superior yields and robust process efficiency.