Used LAM RESEARCH 2300 Exelan Flex FX #9375615 for sale

LAM RESEARCH 2300 Exelan Flex FX is an etching and ashing equipment designed for industrial-scale production of microelectronic components. It can accommodate a wide range of wafer sizes, from the tiniest (200mm) up to larger (450mm) wafer formats. This system utilizes a unique, self-cleaning showerhead design, enabling superior reaction uniformity and faster process times. This design combined with the polyimide-coated wafer platen ensures low particle generation. The Exelan Flex FX has a large range of parameter settings, including etching time and pressure, as well as uniformity temperature control. It delivers very tight tolerances on etch depth and uniformity, allowing for the highest quality etching and ashing. Additionally, the unit allows for precise real-time adjustment of process conditions in order to optimize etch results. The Exelan Flex FX is equipped with a handful of advanced safety features. This includes a hydrogen-peroxide-based cleaning machine that prevents buildup on the chamber walls, preventing contamination. It also has an advanced safety tool for enhanced process safety. It includes an isolation chamber for separating dangerous process gases from the rest of the asset, ensuring the safety of personnel in the facility. Additionally, the Exelan Flex FX has a process recovery feature which helps minimize contamination-related downtime. Finally, the Exelan Flex FX is designed for flexible, process specific tuning. This model allows users to tailor the etching sequence to optimize the results of specific processes. This helps reduce downtime and increase yield. The Exelan Flex FX is a reliable and versatile tool for large-volume production, providing superior etching and ashing results with tighter uniformity tolerances.