Used LAM RESEARCH 2300 Exelan Flex #293767096 for sale

ID: 293767096
Vintage: 2007
Etcher 2007 vintage.
LAM 2300 Exelan is an advanced etch/asher equipment for laboratories, offering precise etch and ashing solutions for a variety of samples. This system allows for multiple process cycles, and can work with a variety of substrates. LAM Exelan 2300 offers a dynamic etch chamber, which provides an even etch, and an automated ashing process. The unit also features a fully enclosed, nitrogen-purged chamber, which eliminates external atmospheric contamination. The Exelan 2300 is also equipped with an on-board computer machine, for operational control and data analysis. The software has two types of memory, RAM and ROM, for program design and storage. It includes a Graphical User Interface (GUI) for easy operation and provides flexibility when it comes to programming and monitoring. The LCD touch-screen display enables detailed control of process parameters, including specified gas flow, temperature, and pressure. LAM Exelan 2300 is also able to perform a wide variety of etch and ashing processes. It is equipped with dry-etch, wet etch, and CMP etching capability, which allows for the removal of material rates from 1 to 10µm/min. The tool can also perform wet etch and O2 etch at up to 10000 rpm. Furthermore, the Exelan 2300 operates under controlled conditions, with temperatures ranging from room temperature up to 200°C. LAM Exelan 2300 is a robust and reliable process asset for etching and ashing solutions. It is equipped with high temperature and fast cycle times, ensuring precise etch and ashing operations. Its on-board computer model provides a user-friendly graphical user interface for easy operation and programming, and its separate memory for programming and data storage further adds to the equipment's convenience. 2300 Exelan is an advanced system that ensures precision operations, ensuring the best results in etching and ashing solutions.
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