Used LAM RESEARCH 2300 Exelan Flex #293767136 for sale
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LAM 2300 Exelan Flex is a sophisticated etcher/asher designed for high precision etching and surface ashing applications in the semiconductor industry. This machine uses an innovative technology called Laser Direct Write to achieve superior etch and ashed results in a range of materials, including metals and oxide layers. It works by transferring the patterns from the laser beam onto the workpiece, using a sophisticated user-controlled translation bed to accurately position the laser beam and control its power. The equipment also includes proprietary software to ensure optimal etching and ashing results in a variety of materials. 2300 Exelan Flex is equipped with an advanced laser diode emitting laser radiation at a power range of 1-20 W. It is capable of etching or ashing layers up to 1 μm thick at a depth rate of up to 1 μm per second. The machine also features a chamber with an enclosed, nitrogen-filled vacuum chamber that ensures safe and optimal etching and ashing processes. The enclosed chamber provides a clean room environment with high level of accuracy and repeatability. In addition, LAM 2300 Exelan Flex is outfitted with an advanced motion control system with multiple servo motor axles and a machine printhead that moves in three dimensions for precise translation bed adjustment. The laser head controls the laser beam intensity, height, and desired gas flow rate for optimal etching and ashing processes as well as an advanced laser-controlled camera with automated focus. The built-in computer offers an intuitive graphical user interface and automated processes for easy operation. 2300 Exelan Flex is designed with safety in mind and features a nitrogen purge unit, low noise operation, and an emergency interlock machine. Its high level of precision and repeatability is suitable for numerous etching and surface ashing applications. With its innovative technology and user-friendly interface, it is an ideal choice for semiconductor manufacturing.
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