Used LAM RESEARCH 2300 Exelan Flex #293768859 for sale

ID: 293768859
Vintage: 2007
Dielectric etcher Process: CuOx (3) Load ports EDWARDS iH600 Pump Gases: C4F6 He/O2 O2 CH2F2 C4F8 Ar CHF3 H2 N2 CF4 2007 vintage.
LAM 2300 is an automated asher/etcher chamber equipment developed by LAM Industrial Automation Inc. for industrial-grade applications requiring semiconductor-level accuracy and repeatability. With its unique combination of high reliability, low cost and flexibility, 2300 is a perfect choice for research, manufacturing, sample preparation and a wide range of other industrial applications. LAM 2300 is designed around a corrosion-resistant stainless steel chamber and vacuum pressure system, capable of maintaining a pressure of up to 30 psia during operation. The unit features a high-quality powder and aggregate feeder, a separate heated gas chamber, up to three separate reaction zones, and a powerful reactor-recycle machine. The feeder and heated gas chamber can be precisely controlled via an intuitive operator interface, allowing for more precise etch and deposition applications. 2300's robust vessel design allows for a variety of interchangeable and removable process chambers, allowing for a wide range of custom etch and deposition applications. The versatile design of the reaction chambers can accommodate thin film processing, large area deposition and chemical surface treatment, while the reactor-recycle tool offers flexible batch or continuous operation. LAM 2300 is also equipped with environmental monitoring features that can be used to ensure process safety. Its integrated dual zone temperature and pressure control offers precise and immediate process control, and its fully automated software asset offers a degree of process monitoring and reporting that is essential for consistent and reliable performance in today's UHV-compatible deposition systems. 2300 provides an optimal solution for industrial-grade etching and deposition applications. Its compact, efficient design makes it ideal for situations where space and power are critical considerations, while its capability for custom requirements allows for a high degree of flexibility in a wide range of etch and deposition applications. LAM 2300's robust operation, wide range of process capabilities, low cost and quick setup make it an ideal choice for high-accuracy and repeat-use applications.
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