Used LAM RESEARCH 2300 Exelan Flex #9121960 for sale

LAM 2300 is a dual chamber metal etching equipment used to rapidly etch vias and other small features into semi-conductor and MEMS substrates. It features a multipurpose version that contains components used in both etching and cleaning processes. The system is able to perform a wide variety of etching processes including precision wet etching, dry etching, fluoropolymer etching, and magnetron sputtering. These processes are used in both single substrate production and large scale production of substrates with more complex structures. The unit includes two independently controlled sub-chambers, each containing a downward oriented cylindrical etching chamber. It is capable of processing up to 350 mm wafers and has an elevating and rotating susceptor, allowing for the precise orientation and etching of a variety of complex structures. For each sub-chamber, a separate cathode/anode pair is used in either wet etching or sputtering processes. The machine contains a gas delivery tool that is capable of an extremely wide range of specialty gases, depending on the process being used. 2300 also includes a powerful post-processing cleans line, allowing for additional processing to be done following the etching process. This line is capable of performing both aggressive and gentle cleans, including the use of HF and SC-1 solutions. The asset is also capable of running both slow and fast etches, allowing for the precise etching of very small features. LAM 2300 also features touchpad controls and pre-programmed recipes, allowing for fast and efficient operation. Overall, 2300 is an extremely efficient and powerful metal etching model that is used for many industrial and scientific applications. Its unique features, such as its two sub-chambers and post-processing cleans line, allow for rapid and precise etching and cleaning of a variety of substrates and structures. As such, it is a powerful tool that is essential for many modern fabrication applications.