Used LAM RESEARCH 2300 Exelan Flex #9222733 for sale
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ID: 9222733
Wafer Size: 12"
Oxide etcher, 12"
AC Rack
Power control rack: AC Rack and P/C
(2) Exelan chambers
Gas module for (3) Exelan chambers
Parts
(3) Cable boxes
Vacuum transfer module:
Airlock: Right and left
TM / PM Facility line
Process module 1 and 2:
(2) Exelan chambers
VAT Pendulum value
Missing parts:
(2) BROOKS Load ports
ATM Robot
Wafer alignment
Wafer alignment module
VTM Robot
Turbo pump (ATH 1600M)
Turbo controller
RF System A/C power
Generator (TCP)
Generator (BIAS)
EFEM
MagnaTran 7
Loader
ESC
RF Cart.
LAM RESEARCH 2300 Exelan is an Etch/Asher equipment designed and manufactured by LAM RESEARCH Corporation. It is a fully automated system capable of processing wafers up to 200 mm diameter. The unit utilizes a single-wafer process module and a chamber-heated chemical vapor delivery machine. 2300 Exelan tool is both efficient and reliable and is suitable for processing a range of wafers with various sizes and structures. Its chamber features an adjustable temperature control that can be adjusted up or down 15° C, allowing for precise and repeatable processing results. It also has integrated design features that improve uniformity, increase precision and minimize damage to wafers. LAM RESEARCH 2300 Exelan Etch/Asher asset has a process pressure of up to 760 mTorr and can operate at temperatures ranging from 70°C to 350°C. It is equipped with a transport process for transferring wafers and a shakers enable to reduce chip uniformity by rapidly changing gas temperatures. The model also has a low dust filter, which is used to capture dust particles during wafer processing. Furthermore, its load lock door has a vacuum tight seal as well as an advanced safety features, which ensures that no contaminants enter the equipment or cause damage. 2300 Exelan system is also equipped with an advanced profiling unit that allows users to optimize profile performance and increase repeatability. The machine has a powerful software interface that allows users to control parameters and monitor data, as well as provides a user-friendly, intuitive graphical interface for operation. LAM RESEARCH 2300 Exelan is an ideal solution for high-throughput etching/ashing of a wide range of materials, including Si, GaAs, Ti, multicrystalline, and amorphous silicon. It is designed with durability and flexibility in mind and is one of the most popular and reliable etching/ashing systems on the market today.
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