Used LAM RESEARCH 2300 Exelan #9205123 for sale

LAM RESEARCH 2300 Exelan is an etch and asher combination tool that is a multi-chamber equipment with an integrated three-chamber design specifically created for process improvement and repeatability. The system is well-equipped to handle a variety of etching and ashing requirements, offering outstanding precision etching and ashing with repeatable results over multiple cycles. 2300 Exelan provides superior control and process capabilities, as well as large process window through its advanced, independent chamber controls and integrated cooling unit. In addition, its integrated glove box helps maintain processing cleanliness for high-value critical instructions. These controls ensure that perfect etching and ashing are achieved each and every time. LAM RESEARCH 2300 Exelan also utilizes multi-stage process recipes in order to allow for the highest level of etch repeatability and availability, ensuring the most effective etching results. This combination tool also provides automatic tube switching, configured substrate loading, and integrated carrier loading, allowing for higher throughput and improved productivity. 2300 Exelan is equipped with advanced safety and environmental protection systems that maintain perfect cleanroom operation as well as user safety. All process gases, exhaust and hazardous material are automatically routed through the machine's integrated scrubbing and filtration systems. The tool also comes with multiple work flow configurations, providing the flexibility to accommodate a wide range of processes. Overall, LAM RESEARCH 2300 Exelan is an excellent etching and ashing tool that provides exceptional capabilities with outstanding accuracy and repeatability. With its integrated safety systems, comprehensive control capabilities, and multiple work flow configuration, this tool is well-suited for a wide range of applications, making it perfect for all types of etch and ashing processes.