Used LAM RESEARCH 2300 Exelan #9249854 for sale

LAM RESEARCH 2300 Exelan is a semiconductor etcher/asher that helps fabricate highly precise and small etched structures on a semiconductor wafer. It can perform etching, oxide stripping, and other critical processes required for semiconductor device fabrication. 2300 Exelan provides high-precision etching of small features, with a repeatability of +/- 3% due to its DC power supply and the advanced optical inspection equipment. It has a wide process window, allowing multiple etching processes to be completed sequentially. LAM RESEARCH 2300 Exelan is equipped with a process control package that allows users to identify and control the etching process parameters. 2300 Exelan is capable of controlling the etching rate, selectivity, uniformity, and critical dimension with high accuracy. The etch depth is highly accurate at +/- 150nm, which makes LAM RESEARCH 2300 Exelan an excellent choice for the fabrication of MEMS devices. 2300 Exelan also features a clamping system that enables accurate and secure positioning of the wafers during etching. In addition, LAM RESEARCH 2300 Exelan can be configured with both batch and in-line systems, allowing for flexibility and scalability. The unit is adaptable to different-sized wafers, ranging from 3 inch to 6 inch. 2300 Exelan also has a high temperature capability, capable of reaching the melting point of some etching materials for the fabrication of 3D ICs. LAM RESEARCH 2300 Exelan is highly reliable and has a robust design that ensures consistent performance in harsh working conditions. It has an operational life of up to 30,000 wafers or up to 500 hours of continuous run time. The machine is also very user-friendly, with an automated control software and built-in cleanroom functionality, such as temperature and pressure monitoring. Overall, the LAM RESERACH 2300 Exelan is an excellent choice for the fabrication of highly precise and small-feature semiconductor devices. Its accuracy, repeatability, and versatility make it a premier etcher/asher for MEMS and microelectronic components.