Used LAM RESEARCH 2300 Exelan #9298287 for sale
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ID: 9298287
Wafer Size: 12"
Dielectric etcher, 12"
Process: KIYO_EXEL_CU
Chambers
V2 Mainframe
(3) Load ports
Chemicals / Gases:
Chamber positions 1, 2, 3 and 4: C4F8, CF4, Ar, H2, CHF3, CH2F2, C4F6, 30%O2He
Does not include Hard Disk Drive (HDD)
Power: 208 AC, 3 Phase, 400 A.
LAM RESEARCH 2300 Exelan is an etching/aspiration system that uses plasma or gas etching to pattern and process organic material on semiconductor wafers. This system is used in the fabrication of integrated circuits, in particular for the advanced memory applications. It features a multi-gun source configuration and is an excellent choice for conformal etching. 2300 Exelan was designed with an eight chamber configuration. It enables it to provide very uniform etched layers that are required for high-quality ICs. It is also designed with a more advanced etching capability which enables plasma to be generated at submicron levels. This etching capability is essential for the fabrication of advanced memory applications. Further, LAM RESEARCH 2300 Exelan has a higher throughput capability, allowing it to process up to 80 wafers per hour. 2300 Exelan is equipped with advanced low-frequency plasma (LFP) generators, allowing it to perform control etching over a wide range of depths. It also boasts innovative control processes such as total pressure tuning and temperature control that help ensure precise etching. Furthermore, LAM RESEARCH 2300 Exelan is designed with an automated source pressure control system which offers the user the flexibility to adjust source pressures for different substrates. 2300 Exelan also includes a set of sensors which perfectly monitor the process parameters and provide the user with open feedback loops to control the etching process. As part of its advanced design, LAM RESEARCH 2300 Exelan also includes a highly advanced algorithm that helps optimize each cycle. This helps enhance the etching rate while maintaining uniformity and accuracy of the finished product. Overall, 2300 Exelan is an excellent choice for conformal etching of delicate substrates. Its high throughput, advanced techniques, and flexibility make it well suited to the rigorous requirements of advanced memory applications. With its multi-gun configuration, precise control, and outstanding accuracy, LAM RESEARCH 2300 Exelan is an excellent option for any of your etching/aspiration needs.
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