Used LAM RESEARCH 2300 Flex 45 #293640239 for sale
URL successfully copied!
Tap to zoom
ID: 293640239
Wafer Size: 12"
Vintage: 2007
Etcher, 12"
RF Match
Missing PENDULUM INSTRUMENT Valve
EDWARDS STP-A2203C3
PENDULUM INSTRUMENT 65048-PH52-ADR1 Valve
Manometer:
CM1: E28D-30653 Range 0.1 Torr
CM2: 625A-14059 Range 10 Torr
CM3: 6254-14059 Range 10 Torr
AC Enclosure
Anapaizer board
DC Enclosure power supply
VME Enclosure
CPU VME 7671
Lon control board
VIOP Board step driver
Lonworks IP Server
RF Feed line
ESC Power supply
OES Cable
(3) Noad boards
Helium MFC
Photon controller
Capacitor control board
Interlock board
SCU-1600 TMP Controller
2 MHz, 5000 W Generator
27 MHz, 3000 W Generator
60 MHz, 2500 W Generator
EFEM:
BROOKS AUTOMATION ATM Robot (151864CUR)
Aligner
Buffer
Cool station
Missing pump
Terminal server
OHT Sensor node board
AGV Node board
Ethernet server
UI Panel
AC Rack:
BROOKS AUTOMATION ATM Robot controller (175789R)
UPS Power supply
Hard Disk Drive (HDD) Missing
PC
Monitor
Circuit breaker
Load port:
BROOKS AUTOMATION V2 (002-7200-29, 32)
LP1
LP2
LP3
VTM:
L-VAT Door: AL1, AL2 (07512-UA24-ADI2)
Angle valve: AL1, AL2, TM (MKS)
Pressure gauge: AL1, AL2, TM
Rocker valve: AL1, AL2, PM2, PM3, PM4
Magnatran7 VTM ROBOT
Solenoid valve
VTM Motherboard
Node board
Super slot board
GIB Gas box:
V2 (IGS Type)
Damper
No FIB
Gas line:
PM2: 571-033051-12535B1, Gas Line: 12
PM3: 571-033051-12535C1, Gas Line: 12
PM4: 571-033051-12535D1, Gas Line: 12
Missing parts:
Hard Disk Drive (HDD)
EFEM Pump
2007 vintage.
LAM RESEARCH 2300 Flex 45 is an advanced-generation etcher/asher made by one of the top semiconductor manufacturers in the industry. 2300 Flex 45 is designed to provide precise and reliable etching of wafers with silicone, germanium, gallium arsenide, and other materials. This part of LAM RESEARCH product line is designed for applications where high-quality results and high productivity are essential. LAM RESEARCH 2300 Flex 45 has a large capacity of up to 45 wafers per chamber, and is highly configurable with separate pods for etching and ashing applications. The etching process is controlled by a powerful control unit that provides a level of precision and repeatability not available from other systems. For precise control, 2300 Flex 45 utilizes a patented vision equipment that scans the pattern in the wafer to provide precise etching results. LAM RESEARCH 2300 Flex 45's deposition chamber is capable of controlling speeds, substrate temperatures, and pressure to create coatings with superior uniformity and yield. This system is known for its robust design, which not only allows for high-yield etching, but also allows for fast process turnaround times and minimal downtime in between each process. The design of this unit also allows for working with high-temperature materials, as well as low-temperature materials. In addition, the machine features an optimized chamber design that ensures uniform gas distribution and a reduction in process temperature gradients. 2300 Flex 45 machine can also be configured with an optional cryo-etching unit, which adds a cryogenic element to the etching process. LAM RESEARCH 2300 Flex 45 is a top-tier etcher/asher in the semiconductor industry, and it is an ideal choice for applications requiring an extremely robust and reliable tool. 2300 Flex 45 features a wide range of powerful features to create uniform, repeatable, and high-yield coatings, while maintaining high process rates and operating temperatures. For any semiconductor application requiring highly precise etching and ashing, LAM RESEARCH 2300 Flex 45 is an excellent choice.
There are no reviews yet