Used LAM RESEARCH 2300 Flex 45 #9235155 for sale

LAM RESEARCH 2300 Flex 45
ID: 9235155
Wafer Size: 12"
Vintage: 2007
Systems, 12" 2007 vintage.
LAM RESEARCH 2300 Flex 45 is an advanced etcher/asher equipment designed to manufacture through-hole and surface mount technology devices. It is a modular, highly integrated system featuring five single-level process chemistries for removal and cleaning of metals and other materials. The Flex 45 is ideal for quick-turn prototyping and production runs of device types such as IC packages, RFID tags, large substrates, and high-frequency ICs. The Flex 45 etcher/asher has a four-station process chamber that uses plasma to clean surfaces for various metals, including germanium, tin, copper, titanium, aluminum, gold, and tungsten. The Flex 45 is capable of etching processing materials between 0.1 and 1.75 mm (0.004 to 0.069 in) in thickness, with a wafer thickness limit of up to 0.6 mm (0.024 in). The unit's five single-level process chemistries include chlorine, hydrogen-chloride, sulfur-hexafluoride, xenon-difluoride, and oxygen-plasma. The Flex 45 is also equipped with process monitoring and control functions. It includes a data collection machine that acquires process data from over 35 sensors to ensure product uniformity and comprehensive tool control. The tool also has advanced graphics software for user-friendly operation, allowing for precise control of the etching process. The Flex 45 is also equipped with a variety of safety and environmental features, including cleanroom design compliant to ISO 14644 classes for particle control. The Flex 45 is equipped with a showerhead feature, providing cleanroom cleaning of ejector pins and cassette parts to ensure a clean working environment. Additionally, the asset offers low emissions of substrates, chemicals, and contaminants to its local environment. 2300 Flex 45 is an essential etching model designed to produce advanced devices while maintaining the highest standard of safety, environmental protection, and performance. Its precise etching capabilities, combined with its intuitive user interface and comprehensive process monitoring/control capabilities make it the perfect tool for precision device production.
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