Used LAM RESEARCH 2300 Flex 45 #9244870 for sale

LAM RESEARCH 2300 Flex 45 etcher/asher is a highly versatile advanced etch and ash equipment. This system is designed to efficiently and quickly etch and ash a wide variety of substrates and materials. With its flexibility, 2300 Flex 45 is ideal for etching, ashing, stripping, and post-ash cleaning of various materials and substrates. This unit is perfect for a variety of applications including those in etchback processes, photomask etching, and back-side processing. LAM RESEARCH 2300 Flex 45 is designed for repeatable, consistent, and highly precise etch and ash processing. It utilizes advanced and robust process controls to provide a uniform result with every etch and ash run. The chamber is also equipped with advanced cooling technology that helps to reduce the substrate temperature while maintaining optimal etch parameters. 2300 Flex 45 is designed to ensure high-uniformity across the entire substrate even with high-density etch chemistry. LAM RESEARCH 2300 Flex 45 has a large process chamber with a high-definition process view window. This allows users to easily monitor and control the entire etching process in real-time. The machine can also be configured with an optional auto-panning tool that enables the camera to move around the chamber as needed. An optional multi-gantry loader allows for up to 8 wafers to be loaded and unloaded simultaneously, further improving process throughput. 2300 Flex 45 is extremely configurable and can be fine-tuned with a number of process parameters such as power, etch time, ash time, resist concentration, etch angle, and backside illumination. Additional features such as anti-contamination shields, advanced process monitoring systems, and optional laser interlock systems can also be added. These features work together to ensure optimum process execution and performance. This etcher / asher asset is built to exacting standards and is highly reliable. It is also designed to minimize maintenance and downtime of the process chamber, which guarantees maximum model uptime. LAM RESEARCH 2300 Flex 45 is backed by LAM RESEARCH, one of the industry-leading names in etching systems.