Used LAM RESEARCH 2300 Flex 45 #9255633 for sale

LAM RESEARCH 2300 Flex 45 is a plasma etcher/asher equipment used for a variety of etching and deposition processes. It is designed to offer an efficient and high-performance etching and deposition process in a mid-size chamber, resulting in improved productivity. The system includes a 45-cm diameter chamber, and a LAM Evergreen® Long Life Batch Etched high-power RF generator to provide the desired process performance. The process pressure range is from 15 mTorr to 550 mTorr and the maximum temperature is up to 300°C. The unit is capable of providing multiple etch processes, from anti-reflective coating (ARC) to wet-cleaning processes with an optional PFG (plasma fluoride generator). Additionally, the machine is equipped with a set of high-level automation features and advanced vacuum-level diagnostics. The logic-controlled, user-friendly software allows users to create process recipes, set-up and monitor the etching process, and analyze the results. The tool also offers high-industry standards in terms of safety, with automated safety procedures and built-in safety relays. An advanced signal lighting asset alerts operators of a malfunction, and an alarm sign is displayed to illustrate a potential safety issue. The model is suitable for more demanding etch processes, such as alloy etch, high temperature processes, and metal etch. 2300 Flex 45 is ideal for semiconductor and MEMS manufacturers looking for an advanced etch/deposition process in a more economical mid-size equipment.