Used LAM RESEARCH 2300 Flex 45 #9261420 for sale
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LAM RESEARCH 2300 Flex 45 is an etcher or asher equipment designed to deliver superior metal etching and ashing performance. It features a high-performance galvanometer-based scanning system that enables precise beam delivery to the wafer surface. The unit is equipped with a dual-wavelength laser generating on the order of 45 mJ pulse energy at 193 nm and 20 mJ pulse energy at 248 nm, providing a highly selective etch/ash through high-energy pulses, while utilizing a very short exposure time. 2300 Flex 45 includes advanced Edge Detection and Blanking capabilities, enabling the machine to focus its laser only on the substrate's edges. Its dynamic scan velocity control makes sure that the etch/ash speed is kept constant while ensuring optimum etch/ash results. It also features an enhanced gas delivery tool to deliver a wide range of etch/ash gases such as chlorine, fluorine, and oxygen with precise flow rates and injection subjectn times. Additionally, LAM RESEARCH 2300 Flex 45 includes a combination of automatic beam centering and beam pointing capabilities to further ensure fast automation. It features a fast wafer loading and unloading mechanism, and is easily upgradeable with the latest RESEARCH capabilities. Furthermore, its operate configuration tools allow users to control the etch/ash process parameters, such as gas flows, beam power, exposure time and edge detection without the need to adjust the components' individual settings. 2300 Flex 45 is suited for research as well as production applications, providing superior etch/ash performance.
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