Used LAM RESEARCH 2300 Flex EX #9227341 for sale

LAM RESEARCH 2300 Flex EX is an advanced etcher / asher designed for high-volume production needs. It is capable of delivering exceptional quality and precision etching and ashing processes on a variety of substrates. 2300 Flex EX features a vacuum-sealed, chemically-resistant chamber that is fully automated, simplifying operation and improving process stability. This closed-loop equipment provides a clean and safe evaporation chamber for reactive and toxic substances with dual contamination control features. An integrated environmental monitoring system is built-in for enhanced process safety. The large chamber allows for large substrate sizes, and can accommodate up to 12"x12"x6" stainless steel or quartz substrates as well as 6" quartz wafers. For effective uniformity, coverage and etching capability, LAM RESEARCH 2300 Flex EX is capable of carrying out etch processes with up to 6 steps and 12 gases. The unit also comes with a choice of two high-performance gas sources, with either a turbo-molecular pumping machine or a combination of a rotary backing pump and a cryo-pump. In addition, 2300 Flex EX features an advanced control tool with a fully programmable process chamber, with a wide range of process and etching configurations. It also has a real-time temperature and pressure monitoring asset, for faster and accurate data acquisition, as well as a range of built-in diagnostic and self-test features for easier operation and troubleshooting. Using the latest hardware and software, LAM RESEARCH 2300 Flex EX offers versatility and reliability at an affordable cost, making it the perfect etching and ashing solution for multiple substrate materials and process applications. With its simplified operation and safety-oriented design, 2300 Flex EX offers a reliable and high-performance production solution.