Used LAM RESEARCH 2300 Flex EX #9270658 for sale

LAM RESEARCH 2300 Flex EX is a high-performance freestanding etcher/asher tool for high-density plasma processing needs. It is built to handle etching and ashing of critical layers for advanced semiconductor device fabrication. 2300 Flex EX has an intuitive open platform user interface, providing easy access to process and recipe management systems, with the ability to store up to 30 recipes. The machine also offers excellent process uniformity, extremely low contamination rates, and superior substrate uniformity. LAM RESEARCH 2300 Flex EX utilizes a variety of engineering process control technologies to ensure excellent etch performance. These include advanced plasma source control for efficient etching, Auto-FID (Advanced Fundamental Interface Diagnostics) for real-time process monitoring, and Process Control Modules (PCMs) for closed loop processing to ensure etch uniformity. 2300 Flex EX also features Windows-based operator consoles, providing an intuitive graphical user interface for easy setup and monitoring. LAM RESEARCH 2300 Flex EX is capable of processing substrates of up to 200mm in diameter and uses either a Remote Plasma Source (RPS) or a Direct Excitation Source (DES) for etching. The design of the machine provides an illuminated process chamber and excellent process stability through using heated gas lines and dual wafer cartridge shutter tracking. 2300 Flex EX also offers an optional remote load lock design for integrated loading and unloading of substrates. LAM RESEARCH 2300 Flex EX is equipped with an integrated in-situ gas supply system that provides for up to 8 gases delivered to the processes, with an integrated backside heating system to ensure a uniform backside temperature of the wafers. The machine also has an in-situ clean feature for post-etch cleaning to eliminate particles and residues in the processing chamber. Finally, 2300 Flex EX offers many advanced in-situ diagnostic functions, such as plasma imaging, for comprehensive process optimization and chamber maintenance. These features, combined with the advanced chamber and process design, make LAM RESEARCH 2300 Flex EX an excellent tool for advanced plasma processing needs.