Used LAM RESEARCH 2300 Flex EX #9270660 for sale

LAM RESEARCH 2300 Flex EX is a single-wafer etcher and asher equipment that provides fast etching and ashing speeds for a variety of etchant and asher gases. The system provides advanced Feature Extraction (FE) technology to ensure the highest-quality etch and ash results. FE automatically adjusts the process parameters for each wafer to ensure consistent results and to maximize throughput. The LAM 2300 Flex EX also features an intuitive user interface that allows for easy setup of etch and ash recipes and enables users to modify process parameters quickly and accurately. The unit's platform provides a wide range of etch and ash capacities, including wet etch, dry etch, pre-passivated etch, deep etch, and corner-relief etching. The LAM LAM RESEARCH 2300 Flex EX is effective for a variety of multi-layer etch processes. It can handle metals as thin as 0.5 microns, complicated clearance shapes, and dimple drilled and electrochemically etched holes. The advanced oxidation and chucking technologies provide better control over the ashing process. The onboard temperature monitor and integrated ashing diagnostics help optimize process performance. The machine's maintenance capabilities include automated preventive maintenance (APM) routines, onboard diagnostics, real-time parameter monitoring, and tool access to support software updates. The LAM 2300 Flex EX allows for rapid and accurate gas delivery, and its advanced safety features ensure user safety and compliance with regulatory standards. This etcher and asher asset helps meet the ever-increasing demands for high-volume production and cost-effective etch and ash performance.