Used LAM RESEARCH 2300 Flex #293604470 for sale
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LAM RESEARCH 2300 Flex Asher/Etcher is an advanced chemical etching/ ashing equipment that provides greater reliability and improved processing performance. This system is capable of handling a wide range of wafers and substrates while offering excellent process control and accuracy. 2300 Flex is extremely user friendly and is suitable for a wide range of applications. The unit includes an etch chamber and a hinged hood, allowing easy access to the entire process chamber. LAM RESEARCH 2300 Flex offers excellent temperature control, with temperature control accuracy to within one degree Celsius. The machine also has a built-in feed tool, to provide a platform for loading and unloading wafers, as well as a large number of distributive valves for chemical feed control. In addition, 2300 Flex also features a variety of advanced asset features to improve process performance. It has Material Parameter Determination (MPD) features to identify key material characteristics for enhanced process control. The model also has an automated process controller which controls all etching and ashing times and temperatures, to ensure consistent and repeatable results. The Asher/Etcher also utilizes an advanced gas delivery equipment which allow for direct gas delivery and exhaust to the reaction chamber. This further increases process stability, wafer uniformity, and overall process efficiency. The system also has multiple filtration/separation and containment systems, which help protect operators and maintain high process quality. Other features of LAM RESEARCH 2300 Flex includes a state-of-the-art wafer handling unit, which can accommodate substrates of up to 6" in size. The machine also has auto-chuck temperatures, to ensure homogenous and repeatable results, and auto-tune agitation for improved process repeatability. Overall, 2300 Flex Asher/Etcher is a powerful, flexible, and user-friendly tool that is capable of handling a wide range of substrates and applications. It is an excellent choice for research and production environments, offering excellent performance and reliability.
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