Used LAM RESEARCH 2300 Flex #9157494 for sale

LAM RESEARCH 2300 Flex Etcher / Asher is a widely used advanced plasma etching and plasma cleaning platform designed for efficient and accurate process control. It is capable of executing multi-chamber sequence recipes and applying uniform etch or clean in reliably repeatable processes. This equipment uses advanced plasma technology to deposit, etch, and clean a variety of materials with precise control. It is ideal for a wide range of applications in the semiconductor, MEMS, electronic, and optoelectronic industries. This system features a 5-axis mechanical transport unit with three modules - process module, storage module, and gate valve module - to deliver high performance. Each module offers unique process benefits and capabilities. Process modules provide a wide selection of process gases, such as reactive ion and etch chemistries, enabling the user to set different etching conditions including high temperature, and RF and DC power levels. The storage module enables dynamic loading and unloading of substrates for processing or storage in either the sealed ambient module or a cleanroom environment. Lastly, the gate valve module allows for fast isolation and gas line switching for overlapping processes. 2300 Flex is equipped with a user-friendly multi-level automation machine, allowing the user to define recipes and control process parameters, thus effectively speeding up and optimizing throughput. It is also equipped with advanced monitoring and diagnostic tools, providing process visibility and real-time feedback to adjust and corrected parameters for greater process stability and reliability. LAM RESEARCH 2300 Flex is a reliable process tool that allows for precise, repeatable performance with loads of process control capabilities. By adopting an advanced multi-chamber sequence design, it supports the integration of a variety of etching and cleaning applications in one tool. Its robust architecture features both mechanical transport and automation systems, which enable users to set process parameters quickly and easily. It offers reliable, repeatable performance while maintaining cost savings and better uptimes. 2300 Flex is a reliable and efficient etcher/asher that meets the needs of multiple markets.