Used LAM RESEARCH 2300 Kiyo E Series #9407036 for sale

LAM RESEARCH 2300 Kiyo E Series is a desktop wafer etcher/asher designed to guarantee process repeatability and accuracy of wafer etching and ashing techniques. This machine enables etching and ashing techniques for wafers in a throughput of 300 WSPM with an accuracy of 0.05 mm on a single wafer. It is ideal for semiconductor device fabrication, biosensor and MEMS production, and research & development applications. 2300 Kiyo E Series features a multi-cavity turret processing chamber that provides multiple levels of environmental control and interface compatibility. It is equipped with a highly sensitive conformal heating equipment, which enables uniform heating of the wafer over its entire surface. This guarantees repeatable and precise results. Furthermore, the high rate of deposition due to the improved conformal heating offers maximum process efficiency while reducing waste. LAM RESEARCH 2300 Kiyo E Series also features a dual-action, double-return end-effector mechanism that controls the wafer handling and places it accurately at the right position for etching and ashing. This is done using a high-dynamic hydraulic system, which provides accurate placement and maintains product integrity. The end-effector mechanism is also compatible with a wide range of wafer sizes, from 50mm to 200mm. The etcher/asher also has an intelligent multi-point control unit that offers precise control over the etching and ashing flow. This machine also enables the machine to auto-tune parameters to enhance repeatability and effectiveness of the process. Additionally, it is designed using a clean design architecture, which guarantees maximum process stability and reduces tool maintenance effort. Finally, 2300 Kiyo E Series offers advanced safety features that ensure the safety of operators, such as an emergency stop button and a safety curtain. This ensures complete operator safety while operating the machine.