Used LAM RESEARCH 2300 Kiyo #293634814 for sale
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ID: 293634814
Wafer Size: 12"
System, 12"
FI
MF
Chamber
AC Rack
Gas up frame and pipe
Load port
Parts box
Gas box
Gas box inlet option: Reg filter inlet gas panel
Gas filters: Standard filter
Transducer type: Display
Chamber isolation valve: Barrier seal door
Gas delivery type: On-board (3 Line)
Injector: Standard (-072)
No leak
O-Rings: Fluorosilicone
PM to pump interconnect: Pump to PM, 100ft
Heated pendulum valve
MFC Type: STEC SEC-Z313
Line 1:
Gas flow-On Board: 1000sccm
Gas type-On Board: N2
Line 2:
Gas flow-On Board: 5000sccm
Gas type-On Board: O2
Line 3:
Gas flow-On Board: 2000sccm
Gas type-On Board: Ar
(3) Load port surface foggy non-functional
Missing parts:
Cooling station
(2) Buffer stations
Does not include HDD.
LAM RESEARCH 2300 Kiyo EX is an efficient etcher/asher capable of providing industry standard levels of advanced material etching/ashing and innovative process capabilities. This etcher/asher is designed to precisely etch/ash detailed structures and patterns into a variety of substrates up to 6 inches in size and is capable of supporting today's most cutting-edge etch/ash applications. 2300 Kiyo EX comes with a built-in, powerful ultra-high vacuum (UHV) plasma etching equipment and high-power RF energy source and turbo pump, allowing users to achieve better control of high etch selectivity with increased etch rate stability. LAM RESEARCH 2300 Kiyo EX also includes a multi-chamber configuration and an advanced chamber temperature control system for finer temperature control and cleaner results. In addition, this etcher/asher unit is equipped with a powerful loadlock machine that quickly and safely transfers substrates into and out of the process chamber for faster wafer loading and unloading. The Kiyo EX also features a high-precision plasma-controlled end-point detection tool, allowing users to accurately and consistently measure the etch/ash depth during etching/ashing operations. With its advanced features and state-of-the-art capabilities, 2300 Kiyo EX is ideal for high-volume etching/ashing operations and provides the flexibility to handle the most challenging etch/ash applications. This etcher/asher asset is compatible with all major wafer cleaning processes and offers improved uniformity and throughput to meet all types of etch/ash requirements. Designed with advanced control features and process capabilities, the Kiyo EX is a reliable and efficient etcher/asher for leading-edge etching/ashing performance.
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