Used LAM RESEARCH 2300 Kiyo MCX #293636765 for sale
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ID: 293636765
Vintage: 2012
Metal etcher
Missing parts:
Qty / Description
(3) / Load ports
(1) / ATM Robot
(1) / Aligner
(1) / EPX180N Pump
(1) / Terminal server
(1) / UI Computer
(1) / 24 V DC Power supply
(1) / ATM Robot controller
(1) / UPS
(1) / TM Solenoid bank
(1) / Scara arm
(1) / VTM Robot
(1) / Super slot board
(4) / Chamber rocker assemblies
(2) / Airlock rocker assemblies
(12) / STEC MFCs
(4) / TCP Matches
(4) / TCP Coil assemblies
(4) / ASSY, 2300 SYM Doors linkage
(4) / ESC, Bowl cover with hinges and pivots
(4) / MNMTR Ports, end PT
(4) / Liner, bias MNTG Plates
(4) / WLDMT, INTFC Chambers separate NOZ
(4) / INJ, Dual, FACSEAL, IEP, HNYCMB, CER
(4) / Windows, ceramic LSR repair
(4) / Windows, quartz
(4) / Rings, edge combo quartz, 12"
(4) / Multiport vacuum valves
(4) / Plasma door shaft sleeves
(4) / Windows, CER LLT CTD Bayonet 2300
(4) / ESC, Tunable M-Z, 12"
(4) / Chambers, top PC 2300 MTL/PL
(4) / TCR
(4) / Liners, SYM Hi-flow 2300 SRC
(4) / Liners, fixed outer ACME 230
(4) / Cantilever liners
(4) / ESC Insulator rings
(4) / HTR-FAN TCW Assemblies (Left hairdryer)
(4) / HTR-FAN TCW Assemblies (Right hairdryer)
(4) / Bias matches
(4) / He enclosures
(4) / PS 15 ABD 24 VDC
(4) / VME
(4) / VAT Pendulum 2300 Valves
(4) / 2.7 L Turbo VAC PMP
(4) / AC Enclosures
(4) / RF Carts
(4) / Node 1
(4) / Interlock boards
(4) / Proces manometers
(8) / Chamber and foreline manometers
(4) / TCP RF Cables
(4) / Bias RF Cables.
LAM RESEARCH 2300 Kiyo MCX is an etcher/asher designed to meet the precise needs of the semiconductor fabrication industry. This advanced equipment was specifically engineered to address the requirements of wet chemical processing of substrates used in semiconductor device manufacturing. The main purpose of this piece of equipment is to selectively etch/ash layers of material on silicon wafers. It is capable of producing ultra-thin layers of materials in order to create features that are only nanometers thick. The thin layers are critical for controlling the dimensions and characteristics of resistive elements such as transistors. 2300 Kiyo MCX is a compact, repeating machine that works in the batch mode. It is a three-axis equipment with a horizontal chamber and powder dispersion system, complete with an integrated magnetic spray. The spray disperses a uniform layer of material on the substrate, which can then be etched/ashed using traditional wet chemical processes. The equipment includes several components, such as a recirculating filter, a quartz envelope, and vacuum unit. The quartz envelope prevents the heat from the resistive element from affecting other areas of the substrate, enabling precise etching/ashing processes. A vacuum machine is used to remove the etched residue and excess material, while the recirculating filter removes contaminants and particulates to ensure the highest quality product. LAM RESEARCH 2300 Kiyo MCX is capable of operating at speeds of approximately 10 feet per second, enabling increased productivity and repeatability. All wet chemical processing steps are automated, while feedback control systems allow the users to monitor the process and easily adjust parameters as needed. In addition, safety features are built into the tool, including alarms and interlocks, to ensure that all processes are completed safely. The high levels of precision and reliability achieved by 2300 Kiyo MCX make it the ideal choice for the complex substrate processing needs of the semiconductor fabrication industry. With its automated systems and comprehensive safety features, this etcher/asher is capable of reliably producing high quality products at high throughput rates.
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