Used LAM RESEARCH 2300 Kiyo #293634890 for sale
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ID: 293634890
Etcher
Chambers missing
Does not include:
ATM / VTM Robots
(3) Loadports.
LAM RESEARCH 2300 Kiyo is a highly advanced etcher/asher used for semiconductor processing. It is a single-chamber equipment that offers both etching and ashing capabilities. The system is designed with advanced technology and performance properties to improve process results. 2300 Kiyo is designed to be extremely easy to use and maintain, with a user-friendly touchscreen interface and well-organized setup options. LAM RESEARCH 2300 Kiyo has a high degree of capability across several application areas, including integrated circuit fabrication and non-volatile memory fabrication. The unit utilizes a gas injection unit (GIS) and multi-stream gas distribution machine (GDS) to ensure optimal process control. The GIS is capable of highly accurate and repeatable flow control while the GDS allows multiple independent etcher recipes to be run simultaneously. Additionally, the tool includes a range of features that make it suitable for many different processes, including remote end-point tuning and flexible recipes. The etching asset also offers a range of indexer-controlled hardware options, including a high-speed scanner, a rotatable sample holder, and an alignment model. This allows for the fabrication of highly complex structures without the need for manual alignment. The equipment is capable of operating in temperatures up to 200°C and can process both dielectric and conductive materials with a range of etch processes. In addition, 2300 Kiyo features a range of safety and environmental protections, including end-of-process waste recover systems and flow-vacuum containment systems. Its intuitive HMI allows users to monitor all process parameters and reaction rates in real time. All of these features make LAM RESEARCH 2300 Kiyo a highly effective, efficient, and reliable tool for semiconductor fabrication.
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