Used LAM RESEARCH 2300 Kiyo #293775899 for sale

LAM RESEARCH 2300 Kiyo is an automated etch/ash equipment and is designed to perform both etch and ash processes on multiple wafers in a single tool with both wet and dry process capabilities. This system is designed to be reliable, efficient, and cost-effective. The Kiyo is equipped with automated wafer transport, wafer handling and wafer cooling functions for multiple wafers. It includes a self-contained process chamber and is constructed from tough, corrosion-resistant stainless steel to ensure reliable operation. The chamber provides uniform thermal and process conditions across all wafers, enabling a consistent etch or ashing performance. This unit is also equipped with a Quartz Edge Ring, which maximizes uniformity and minimizes redeposition of process material. The Kiyo is capable of handling a wide variety of wafer sizes, ranging from 2-8 inch wafer diameters. It is capable of etching and ashing high-density materials such as tungsten and polysilicon, which has various features including high aspect ratio walls and vias. This machine is also capable of processing small passages, inclusions, and other high aspect ratio features ranging from 0.1 micron to 0.5 micron. The Kiyo is designed to provide repeatable, accurate etching and ashing performance. It is equipped with high speed, precision-tuned mass flow controllers and a digital process controller with real-time data logging capability. The tool is capable of etching and ashing multiple wafers simultaneously, enabling extremely fast processing throughput. It has reliable, adjustable, and temperature controlled delivery of process gases for variable speed etching and ashing. The Kiyo is equipped with a two-stage vacuum asset for wafer loading and unloading. It also has an automated wafer cleaning model, which uses ozone-free laminar flow for deep cleaning. This equipment also includes an online wafer metrology system, which ensures accuracy and repeatability of etched and ashed features. Overall, 2300 Kiyo etch/ash unit is an efficient and cost-effective machine that produces high-quality etching and ashing performance.