Used LAM RESEARCH 2300 Kiyo #293829181 for sale

LAM RESEARCH 2300 Kiyo is a revolutionary etch and asher equipment from LAM RESEARCH Corporation, designed to provide reliable, repeatable, and efficient processing of device features. It features two advanced upstream and downstream etching systems - the Advanced Etch and Ash System (AEAS) and the High Etch and Ash Unit (HEAS). The onboard AI-based advanced recipes enable accurate control of the etch and ash process in order to achieve superior device structures with no damage to the silicon structure. The AEAS machine provides rapid etching of the device architecture at ultra-high rates and the ability to customize process parameters for each die. This allows the tool to achieve remarkable yields with excellent repeatability. The HEAS asset further provides the flexibility to accommodate both deep etch and shallow etch requirements while maintaining superior feature fidelity. 2300 Kiyo also features a high-resolution imaging model that allows for precise monitoring of features at die level. This, combined with automated inspection and auto-compensation functions, allows for accurate and repeatable device structure execution. In addition, advanced monitoring functions provide visibility into the process control parameters and allow for remote adjustment in the event of process drift. Unique to LAM RESEARCH 2300 Kiyo is its separation of the etching and metal deposition stages, providing higher device yields, reduced inspection times, and excellent post-process performance. The equipment's advanced edge-to-edge uniformity capabilities ensure uniform film deposition within tight tolerances to produce high-quality feature structures. In addition, the system offers complete metrology capabilities. The auto-compensation functions allow for rapid measurements of die characteristics, allowing for greater control and improved yield. The unit provides exceptional reliability and availability while using minimal energy, making it an ideal cost-effective solution for etching and ashing needs. With a combination of high performance and repeatability, 2300 Kiyo is a cutting-edge etch and asher machine that is sure to set a new standard in productivity.