Used LAM RESEARCH 2300 Kiyo3x #9249855 for sale

LAM RESEARCH 2300 Kiyo3x
ID: 9249855
Etcher.
LAM RESEARCH 2300 Kiyo3x is a state-of-the-art etcher/asher used in semiconductor manufacturing processes. It offers advanced technology and features designed to improve productivity, yield, and quality. It is a versatile machine that can be used to etch and ash wafers, bezels, and other semiconductor components. 2300 Kiyo3x features a closed-loop Integrated Process Monitoring and Control (IPM/C) equipment, which ensures product repeatability and throughput optimization. This machine also provides precise temperature control, power monitoring, and RF energy coupling to ensure that the process is optimized for each specific wafer. LAM RESEARCH 2300 Kiyo3x is equipped with an advanced in-situ Cluster Removal Detection (CRD) system that uses a capacitive sensor array to detect and monitor wafer clusters in real-time. 2300 Kiyo3x includes a high performance binary gas unit with an integrated bulk gas delivery machine, which allows for accurate gas control and mixed-gas delivery. Additionally, this machine features a high-speed gas switching tool with minimal gas-flow disruption, which allows for high throughputs and low cross-contamination. The asset is also equipped with a number of safety features such as, a low-power load-lock to prevent unintentional process pressure spikes, high-current plasma protection, and several audible and visual leak detectors. LAM RESEARCH 2300 Kiyo3x is split into three basic modules: the Reactive-Ion-Etcher (RIE), the Acid-Etch (AE), and the Asher. The RIE model is an advanced vacuum-plasma based process that is used to remove resists, films, and polymers. The AE equipment is used to transfer a pattern from a mask to the wafer. The Asher is a post-processing etcher to clean any residue that remains after the etching process. 2300 Kiyo3x provides a comprehensive tool management package, which assists in the scheduling and management of the tools required for each specific application. This system reduces set-up times and production downtime by improving data management and sharing. Additionally, LAM RESEARCH 2300 Kiyo3x provides process support by monitoring process data and providing detailed analysis of chamber performance. This helps to ensure a consistently high yield. In conclusion, 2300 Kiyo3x is an advanced etcher/asher unit offering the latest technology and features. It provides excellent process control and monitoring, high throughputs, low contamination, and overall improved productivity. All of these features make LAM RESEARCH 2300 Kiyo3x an excellent choice for any semiconductor application.
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