Used LAM RESEARCH 2300 Metal #9314599 for sale

LAM RESEARCH 2300 Metal is an etcher/asher designed to be used for etching and ashing a variety of metal and other semiconductor materials. This is achieved with the help of a multi-chamber design with three plasma chambers, two etch chambers and one asher. It is a highly reliable process solution for consistent metal etching and ashing with repeatable results. The etch chamber is capable of etching various metals using a variety of etch gas preferences such as nitrogen, hydrogen, oxygen-based, and chlorine-based gases. It also includes numerous process recipes that are easily executed with the help of a user-friendly user interface. LAM RESEARCH also features an integrated multi-chamber configuration to ensure efficient and uniform etching and ashing. The asher is capable of ashing a variety of metalized substrates including gold, copper, aluminum, and titanium. In addition, it can also ash a wide assortment of nonmetalized substrates such as passivation layers, dielelectrics, and polysilicon. The asher features an ashing depth of 1 to 5 microns with a process repeatability of better than 1%. 2300 Metal is equipped with a variety of safety features such as an exhaust safety probe and integrated tilt safety monitor. The exhaust safety probe is designed to monitor the pressures generated in the chambers for extended operation. The integrated tilt safety monitor is used to ensure that the chamber is properly aligned to prevent etching or ashing for excessive duration, thus avoiding damages to the substrate. Moreover, it features a high-performance, automated controller with a graphical user interface, which provides comprehensive control over the etch and ashing processes. The integrated user interface provides users with the ability to quickly program the tool, monitor the etch and ashing process, and change/modify/read the chamber parameter settings. The controller is also designed for easy integration with other etching systems and automation control systems. Overall, LAM RESEARCH 2300 Metal is an excellent choice for metal etching and ashing. It provides the utmost levels of precision, accuracy, and reliability with minimal damages to the substrate. It is also backed with reliable and efficient customer service for easy setup and extended operation.