Used LAM RESEARCH 2300 V2 #293595429 for sale
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ID: 293595429
Wafer Size: 12"
Vintage: 2002
Plasma processing system, 12"
Etch platform
(4) Exelan Chambers
(4) Gas boxes
Remote power distribution box
3LP EFEM
Vacuum transfer module
Control rack
BROOKS AUTOMATION ATR8 ATM Robot
BROOKS AUTOMATION MAG7 VTM Robot
(2) FOUPs
Cassette type: 25
No conditioning station
IPX / EPX Pump for TM
Side monitor user interface
Stainless wafer pads
No UPS
No ELB
R-O-G-B Signal tower
ESC Wafer clamping mechanism
ESC Power supply
ESC Hose kit
ESC Barbed facility plate
Wafer life mechanism: Direct drive
O-rings: Fluorosilicon / Viton
ATH 1600 M Turbo pump
Optical emission spectroscopy
Chemraz gate valve
2002 vintage.
LAM RESEARCH 2300 V2 Asher is a fully automated, high-accuracy etcher/asher designed for dry etching of certain materials. It is ideal for use in applications such as device manufacture, semiconductor device processing, MEMS production, circuit board fabrication, and other mass production processes. It is capable of reaching etch depths of up to 300 µm, has an etching accuracy of ±0.05µm, and can operate at a variety of temperatures up to 3000°F (1650°C). 2300 V2 Asher is driven by a sophisticated controller that includes a blowback recirculated wafer cassette drive equipment and a closed-loop process chamber with a vacuum system for optimal process control. The process chamber contains two independent etching systems, the first for etching the substrate and the second for backside etching. It also includes an overhead robot locator and autofocus software. The wafer cassette drive unit allows for efficient loading/unloading of wafers for improved throughput. LAM RESEARCH 2300 V2 is equipped with a number of safety features such as an emergency stop button, interlock protection, a fume detection and filtration machine, and a forced air purge to prevent hazardous gases and aerosols from escaping the process chamber. These features ensure reliable and safe operation of the etcher. 2300 V2 provides a complete etching solution with integrated process control and software. This includes a powerful set of process tools and parameter controls that can be programmed, monitored, and adjusted as needed. This allows users to optimize their process with maximum precision and traceability. The tool is also designed to accommodate a wide variety of customized scripting via the open-source scripting language, allowing users to modify the asset to their specific needs. In conclusion, LAM RESEARCH 2300 V2 is an advanced automated etcher/asher with a wide range of features and capabilities. Its advanced process control and safety features, as well as its open-source scripting language, ensure reliable and accurate operations. Its temperature capability, etching accuracy and throughput make it the ideal choice for mass production and other high-precision fabrication processes.
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