Used LAM RESEARCH 2300 Versys Kiyo 45 #9282805 for sale

LAM RESEARCH Kiyo is a state-of-the-art high throughput dielectric etcher / asher designed and manufactured by LAM RESEARCH. It supports both traditional wet etching and dry ashing processes for wafer cleaning and preparation prior to further processing. Kiyo is an excellent tool for high accuracy dielectric etching / ashing due to its innovative design, with dual-stage process capability and rotatable chuck for improved uniformity. It is capable of etching a variety of dielectric materials such as nitride and oxide films, as well as high-k metal gate stacks. LAM RESEARCH Kiyo is available in either a single wafer or pod handling configuration, featuring a maximum chamber size of 331 mm and a maximum bakeplate temperature of 500°C. Kiyo is provided with a powerful embedded workcell controller, allowing for fast wafer load time and precise process control. The workcell comes with a proprietary virtual substrate control (VSC) system which ensures highly repeatable substrates. The controller also provides access to real-time wafer data such as temperature and gas flow for improved process control. LAM RESEARCH Kiyo has been designed for easy and safe maintenance and service. The chamber is equipped with dual pressure ports, making for a faster process cycle than single-port chambers. Automated cleaning capability is also available through the integrated LAM Clean Chamber software, which minimizes maintenance downtime. In addition, Kiyo offers numerous advanced features such as high precision temperature control, multi-gas capability, and low particle performance. LAM RESEARCH Kiyo is a reliable tool for precise wafer preparation, enabling the production of consistently high-quality dielectrics. It offers superior quality replicates with reduced yield variation and maximum robustness.