Used LAM RESEARCH 2300 Versys Kiyo 45 #9363127 for sale

LAM RESEARCH 2300 Versys Kiyo 45 is a high-performance etcher / asher that is used for Process Development as well as IC fabrication. This etcher / asher provides advanced process capabilities to meet the demanding requirements of device production. This is a versatile tool that can be used for a variety of etching and ashing processes. It is designed to support a variety of etch technologies such as metal-etching, dielectric etching, thermal decomposition, contact-etching with halogens, contact-etching with gases, and contact-etching with mixed halogen and gas-phase reactants. It also supports ashing processes like deep-level RIE and plasma treatments. This versatilty allows users to support their particular process development or production process with the least amount of system re-configuration. The Versys Kiyo 45 offers users precise process repeatability, "movie-mapping" with process recipes that can be up to 50 steps long and be up to 256×256 array, and real-time OPC (Optical Critical Dimension) measurements enabling users to review their process quality in-situ and on-demand with the integrated tool's inspection chamber. This inspection chamber has a vision field of up to 40×30mm and can be used to analyze the physical features of the wafers or work-pieces. LAM RESEARCH 2300 VERSYS KIYO45 utilizes a pump set which can be driven from 0-45 l/min for superior levels of pressure control. At the same time, the Versys Kiyo 45 is a fully-automatic tool capable of operating within auto-opt and auto-clean cycles and utilizes a wide variety of gases and chemicals to support the etching and cleaning processes. The Versys Kiyo 45 also provides users with optional filtration to enable users to reduce the possibility of particles being introduced into the etch/ash system. This system also offers clean-in-place functionality with either liquid or gaseous-phase processes. Overall, 2300 Versys Kiyo 45 is an advanced, highly-capable etcher/asher. It offers users with superior levels of repeatability, on-demand process monitoring with integrated tool inspection, and optional filtration and CIP processes. The Versys Kiyo 45 is an ideal choice for users to support their high-precision IC fabrication operations.