Used LAM RESEARCH 2300 Versys Kiyo Poly #293762655 for sale

LAM RESEARCH 2300 Versys KIYO Poly is an etching equipment designed for polysilicon etching and glass dielectric materials. This advanced etcher features a high-throughput, fully automated platform that is capable of producing high-resolution patterning profiles with precision repeatability and uniformity across the full substrate size range. The high-resolution patterning capabilities of the Versys KIYO Poly make it ideal for applications such as photomasks, gate dielectrics, and electronic device fabrication. The Versys KIYO Poly system utilizes a plasma-based etching process that produces high-accuracy vertical wall features, straight geometry, and sharp edges with minimal undercutting. It features a wide, user-friendly process range with flexibility for different pattern sizes, line widths, and aspect ratios. It is highly configurable with options for overpressure, process automation, and throughput control. The etcher also offers advanced integrated process monitoring to ensure optimal etching quality. This includes auto-sequenced recipes with automated process parameter adjustment based on real-time etching process results. It also offers advanced temperature control, depth measurement, and endpoint detection capabilities that allow for accurate etching of polysilicon films. The Versys KIYO Poly is designed to operate with high reliability and low maintenance. It utilizes cryogenic gas delivery systems and includes self-programming reactors that reduce the need for frequent resetting. The unit is also equipped with an integrated sub-ambient dry pump that offers quiet, low dust operation. The Versys KIYO Poly machine is designed to offer superior etching performance and is especially well-suited for high-accuracy, high-resolution polysilicon etching. With its fully automated, user-friendly design, this tool is ideal for applications that require high precision, fast throughput, and low maintenance.