Used LAM RESEARCH 2300 Versys Kiyo Poly #9257976 for sale

LAM RESEARCH 2300 Versys Kiyo Poly is an industrial etcher / asher used to etch and/or asher substrates in semiconductor chip manufacturing processes. The etching and ashing are completed in-line, requiring only one machine instead of two separate, standalone etchers and ashers. This tool utilizes a Poly-Cool™ cooling plate for precise mapping of wafer temperatures, which helps to ensure uniform cooling of etched and ashed wafers. Every batch of wafers can be accurately processed using 2300 Versys Kiyo Poly. It can accommodate up to 300 wafers, allowing for high-volume production and efficient lot-to-lot consistency. The tool is integrated with Poly-Controller™ Programmable Logic Controllers and Programmable Automation Controllers, which enable precise control of the etching and ashing parameters. Users can setup and store different process recipes for different materials or wafer thicknesses. LAM RESEARCH 2300 Versys Kiyo Poly is equipped with P3™ Advanced Pressure Profiling technology, which is installed in the plasma-etch chamber. This technology reduces the complexity of pressure profiles for better process control while etching. It has a variety of etching and ashing gasses such as Fluorine, Oxygen, Cl2, and Ar, and allows for automated mass flow control of gasses. The remote plasma source option reduces particle generation, eliminating potential source of variation during the CMP process. The machine features automatic gas configurations, which allows users to setup the system, store multiple gas configurations and change the gas configuration remotely. This helps to reduce waste associated with manual setup, and users can easily switch between recipes without additional setup time. 2300 Versys Kiyo Poly also features top-opening doors for easy loading and unloading of cassette cups, making it much easier to handle wafers. It is also compatible with Teflon™ filters, which helps to reduce carbon contamination and other contaminates, ensuring a high-quality product.